TY  - RPRT
TI  - Unreleased polysilicon beam failure. MEMS Reliability Alliance Technical Report 37-01
AU  - Lawton, R.
AU  - Lin, G.
AU  - Wellman, J.
PY  - 2000
UR  - https://ntrs.nasa.gov/citations/20060031061
ID  - 20060031061
ER  -