@misc{indiciae0be04749725e,
  title = {Commercial-Off-The-Shelf Microelectromechanical Systems},
  author = {Rameshan, R. and Ghaffarian, R.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20060032176},
  note = {Source identifier: 20060032176}
}