@misc{indiciaedc2d6fcd57ab,
  title = {Establishing Engineering Methods and Criteria Required by Predictive Analysis for Mechanical Reliability of MEMS Structures},
  author = {Lawton, R. and Knauss, W.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20060032257},
  note = {Source identifier: 20060032257}
}