TY  - RPRT
TI  - Establishing Engineering Methods and Criteria Required by Predictive Analysis for Mechanical Reliability of MEMS Structures
AU  - Lawton, R.
AU  - Knauss, W.
PY  - 2000
UR  - https://ntrs.nasa.gov/citations/20060032257
ID  - 20060032257
ER  -