@misc{indiciaef3770691d61b,
  title = {Challenges in Interconnection and Packaging of Microelectromechanical Systems (MEMS)},
  author = {Rameshan, R. and Ghaffarian, R.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20060032340},
  note = {Source identifier: 20060032340}
}