TY  - RPRT
TI  - Challenges in Interconnection and Packaging of Microelectromechanical Systems (MEMS)
AU  - Rameshan, R.
AU  - Ghaffarian, R.
PY  - 2000
UR  - https://ntrs.nasa.gov/citations/20060032340
ID  - 20060032340
ER  -