@misc{indiciae89744d8bcbb3,
  title = {Precision actuation of micro-space structures},
  author = {Hickey, G. and Lih, S. S. and Wang, D. W. and Tzou, H. S.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20060033593},
  note = {Source identifier: 20060033593}
}