@misc{indiciae4aa7009a2296,
  title = {Sub-Optical Lithography with Nanometer Definition Masks},
  author = {Hartley, F. and Khan-Malek, C. and Neogi, J.},
  year = {1998},
  url = {https://ntrs.nasa.gov/citations/20060033865},
  note = {Source identifier: 20060033865}
}