TY  - RPRT
TI  - Sub-Optical Lithography with Nanometer Definition Masks
AU  - Hartley, F.
AU  - Khan-Malek, C.
AU  - Neogi, J.
PY  - 1998
UR  - https://ntrs.nasa.gov/citations/20060033865
ID  - 20060033865
ER  -