@misc{indiciae08bf1cf3ac74,
  title = {3D Metrology for Process Control and Structure Integrity for Evaluating MEMS Reliability for Space Applications},
  author = {Lawton, R. and Krueger, R. and Koester, D.},
  year = {1999},
  url = {https://ntrs.nasa.gov/citations/20060034426},
  note = {Source identifier: 20060034426}
}