TY  - RPRT
TI  - 3D Metrology for Process Control and Structure Integrity for Evaluating MEMS Reliability for Space Applications
AU  - Lawton, R.
AU  - Krueger, R.
AU  - Koester, D.
PY  - 1999
UR  - https://ntrs.nasa.gov/citations/20060034426
ID  - 20060034426
ER  -