@misc{indiciaee473cf0f9e5c,
  title = {Challenges in Interconnection and Packaging of Microeletromechanical Systems (MEMS)},
  author = {Ramesham, R.},
  year = {2000},
  url = {https://ntrs.nasa.gov/citations/20060034449},
  note = {Source identifier: 20060034449}
}