@misc{indiciaef9ae0dcb2373,
  title = {Microelectronics Packaging Issues of Microelectromechanical Systems (MEMS)},
  author = {Ramesham, R.},
  year = {1999},
  url = {https://ntrs.nasa.gov/citations/20060034879},
  note = {Source identifier: 20060034879}
}