@misc{indiciaeee57ae4dac5d,
  title = {A Micro-Fabricated Quadrupole Mass Spectrometer},
  author = {Brennan, R. and Chutjian, A. and Fuerstenau, S. and Hecht, M. and Orient, O. and Wiberg, D. and Yee, K.},
  year = {1997},
  url = {https://ntrs.nasa.gov/citations/20060035426},
  note = {Source identifier: 20060035426}
}