@misc{indiciaed27fd87144e5,
  title = {Taguchi Optimization for the Processing of Epon SU-8 Resist},
  author = {Eyre, B. and Blosiu, J. and Wiberg, D.},
  year = {1998},
  url = {https://ntrs.nasa.gov/citations/20060035690},
  note = {Source identifier: 20060035690}
}