TY  - RPRT
TI  - Taguchi Optimization for the Processing of Epon SU-8 Resist
AU  - Eyre, B.
AU  - Blosiu, J.
AU  - Wiberg, D.
PY  - 1998
UR  - https://ntrs.nasa.gov/citations/20060035690
ID  - 20060035690
ER  -