@misc{indiciaeaa98f2c5d362, title = {Advances in Submillimeter Semiconductor-Based Device Designs and Processes}, author = {Smith, R. P. and Martin, S. C. and Kim, M. and Bruston, J. and Mehdi, I. and Humphrey, D. and Gaidis, M. and Erickson, N. and Siegel, P. H.}, year = {1997}, url = {https://ntrs.nasa.gov/citations/20060035832}, note = {Source identifier: 20060035832} }