@misc{indiciae31a7e4cf072a,
  title = {Sub-ppb Oxygen and Moisture Contaminant Detection in Semi-Conductor Processing},
  author = {Man, Kin F. and Said, Boumselleck},
  year = {1996},
  url = {https://ntrs.nasa.gov/citations/20060036321},
  note = {Source identifier: 20060036321}
}