@misc{indiciae8b21e3facad1, title = {Packaging and Qualification of Mems-Based Space Systems}, author = {Muller, L. and Hecht, M. H. and Miller, L. M. and Rockstad, H. K. and Lyke, J. C.}, year = {1996}, url = {https://ntrs.nasa.gov/citations/20060036322}, note = {Source identifier: 20060036322} }