TY - RPRT TI - Packaging and Qualification of Mems-Based Space Systems AU - Muller, L. AU - Hecht, M. H. AU - Miller, L. M. AU - Rockstad, H. K. AU - Lyke, J. C. PY - 1996 UR - https://ntrs.nasa.gov/citations/20060036322 ID - 20060036322 ER -