@misc{indiciae360c195a6553,
  title = {A Chemical and Structural Study of the AlN-Si Interface},
  author = {Beye, R. and George, T. and Yang, J. W. and Khan, M. A.},
  year = {1997},
  url = {https://ntrs.nasa.gov/citations/20060036817},
  note = {Source identifier: 20060036817}
}