TY  - RPRT
TI  - A Chemical and Structural Study of the AlN-Si Interface
AU  - Beye, R.
AU  - George, T.
AU  - Yang, J. W.
AU  - Khan, M. A.
PY  - 1997
UR  - https://ntrs.nasa.gov/citations/20060036817
ID  - 20060036817
ER  -