@misc{indiciae1973cb3b13ee,
  title = {A Common-path, Multi-channel Heterodyne Laser Interferometer for Sub-nanometer Surface Metrology},
  author = {Zhao, F. and Logan, J. and Shaklan, S. and Shao, M.},
  year = {1999},
  url = {https://ntrs.nasa.gov/citations/20060040521},
  note = {Source identifier: 20060040521}
}