@misc{indiciae047c6a6a1e0d, title = {Stitching Error Reduction in Electron Beam Written Gratings}, author = {Dougherty, D. and Muller, R. and Maker, P. and Mansour, K. and Chacon, R. and Qiu, Y. and Young, M. and Forouhar, S.}, year = {2000}, url = {https://ntrs.nasa.gov/citations/20060041040}, note = {Source identifier: 20060041040} }