@misc{indiciaec7b08319f169,
  title = {Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Quantum Limit},
  author = {Dowling, J. and Boto, A. and Abrams, D. and Williams, C.},
  year = {1999},
  url = {https://ntrs.nasa.gov/citations/20060041053},
  note = {Source identifier: 20060041053}
}