TY  - RPRT
TI  - Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Quantum Limit
AU  - Dowling, J.
AU  - Boto, A.
AU  - Abrams, D.
AU  - Williams, C.
PY  - 1999
UR  - https://ntrs.nasa.gov/citations/20060041053
ID  - 20060041053
ER  -