@misc{indiciae61e2bc9a1167,
  title = {Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures},
  author = {Gutierrez, R. C. and Shcheglov, K. V. and Tang, T. K.},
  year = {1998},
  url = {https://ntrs.nasa.gov/citations/20060041282},
  note = {Source identifier: 20060041282}
}