TY  - RPRT
TI  - Pulsed-Source Interferometry for Characterization of Resonant Micromachined Structures
AU  - Gutierrez, R. C.
AU  - Shcheglov, K. V.
AU  - Tang, T. K.
PY  - 1998
UR  - https://ntrs.nasa.gov/citations/20060041282
ID  - 20060041282
ER  -