@misc{indiciaed1c371145cb7,
  title = {Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph Actuators},
  author = {Hishinumat, Yoshikazu and Yang, Eui - Hyeok (EH)},
  year = {2005},
  url = {https://ntrs.nasa.gov/citations/20060044297},
  note = {Source identifier: 20060044297}
}