TY - RPRT TI - Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph Actuators AU - Hishinumat, Yoshikazu AU - Yang, Eui - Hyeok (EH) PY - 2005 UR - https://ntrs.nasa.gov/citations/20060044297 ID - 20060044297 ER -