@misc{indiciaeefef830f1ee2,
  title = {A Wafer Transfer Technology for MEMS Adaptive Optics},
  author = {Yang, Eui-Hyeok and Wiberg, Dean V.},
  year = {2001},
  url = {https://ntrs.nasa.gov/citations/20070036011},
  note = {Source identifier: 20070036011}
}