TY  - RPRT
TI  - A Hardware Platform for Tuning of MEMS Devices Using Closed-Loop Frequency Response
AU  - Ferguson, Michael I.
AU  - MacDonald, Eric
AU  - Foor, David
PY  - 2005
UR  - https://ntrs.nasa.gov/citations/20070036656
ID  - 20070036656
ER  -