@misc{indiciae83da23779c3a, title = {Miniature micromachined quadrupole mass spectrometer array and method of making the same}, author = {Chutjian, Ara and Fuerstenau, Stephen D. and Orient, Otto J. and Yee, Karl Y. and Rice, John T.}, year = {2000}, url = {https://ntrs.nasa.gov/citations/20080004433}, note = {Source identifier: 20080004433} }