TY  - RPRT
TI  - Diffractive optical elements on non-flat substrates using electron beam lithography
AU  - Maker, Paul D.
AU  - Muller, Richard E.
AU  - Wilson, Daniel W.
PY  - 2002
UR  - https://ntrs.nasa.gov/citations/20080004513
ID  - 20080004513
ER  -