@misc{indiciae24447ea9a6fd,
  title = {Fabrication system, method and apparatus for microelectromechanical devices},
  author = {Johnson, A. David and Busta, Heinz H. and Nowicki, Ronald S.},
  year = {1999},
  url = {https://ntrs.nasa.gov/citations/20080004526},
  note = {Source identifier: 20080004526}
}