TY  - RPRT
TI  - Fabrication system, method and apparatus for microelectromechanical devices
AU  - Johnson, A. David
AU  - Busta, Heinz H.
AU  - Nowicki, Ronald S.
PY  - 1999
UR  - https://ntrs.nasa.gov/citations/20080004526
ID  - 20080004526
ER  -