@misc{indiciae49148fd99f69,
  title = {Ellipsometer},
  author = {Ducharme, Stephen Paul and El Hajj, Hassanayn Machlab and Johs, Blaine D. and Woollam, John A.},
  year = {1997},
  url = {https://ntrs.nasa.gov/citations/20080004630},
  note = {Source identifier: 20080004630}
}