@misc{indiciaed1b65b72e59c,
  title = {Microfabricated structures with electrical isolation and interconnections},
  author = {Clark, William A. and Juneau, Thor N. and Roessig, Allen W. and Lemkin, Mark A.},
  year = {2001},
  url = {https://ntrs.nasa.gov/citations/20080004660},
  note = {Source identifier: 20080004660}
}