TY - RPRT TI - Miniature micromachined quadrupole mass spectrometer array and method of making the same AU - Chutjian, Ara AU - Hecht, Michael AU - Orient, Otto AU - Wiberg, Dean AU - Brennen, Reid A. PY - 2001 UR - https://ntrs.nasa.gov/citations/20080004669 ID - 20080004669 ER -