@misc{indiciae3156a6683da7,
  title = {Small modulation ellipsometry},
  author = {Ducharme, Stephen P. and El Hajj, Hassanayn M. and Johs, Blaine D. and Woollam, John A.},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/20080004777},
  note = {Source identifier: 20080004777}
}