TY  - RPRT
TI  - Miniature micromachined quadrupole mass spectrometer array and method of making the same
AU  - Chutjian, Ara
AU  - Fuerstenau, Stephen D.
AU  - Orient, Otto J.
AU  - Yee, Karl Y.
AU  - Rice, John T.
PY  - 2001
UR  - https://ntrs.nasa.gov/citations/20080004886
ID  - 20080004886
ER  -