@misc{indiciae05f88755b70c,
  title = {Large area polysilicon films with predetermined stress characteristics and method for producing same},
  author = {Heuer, Arthur H. and Kahn, Harold and Yang, Jie and Phillips, Stephen M.},
  year = {2002},
  url = {https://ntrs.nasa.gov/citations/20080004952},
  note = {Source identifier: 20080004952}
}