TY  - RPRT
TI  - Large area polysilicon films with predetermined stress characteristics and method for producing same
AU  - Heuer, Arthur H.
AU  - Kahn, Harold
AU  - Yang, Jie
AU  - Phillips, Stephen M.
PY  - 2002
UR  - https://ntrs.nasa.gov/citations/20080004952
ID  - 20080004952
ER  -