@misc{indiciaefe87beb79aff,
  title = {Low stress polysilicon film and method for producing same},
  author = {Heuer, Arthur H. and Kahn, Harold and Yang, Jie},
  year = {2002},
  url = {https://ntrs.nasa.gov/citations/20080004964},
  note = {Source identifier: 20080004964}
}