@misc{indiciae417e28e510af, title = {Silicon based substrate with environmental/ thermal barrier layer}, author = {Eaton, Jr., Harry Edwin and Allen, William Patrick and Jacobson, Nathan S. and Bansal, Nanottam P. and Opila, Elizabeth J. and Smialek, James L. and Lee, Kang N. and Spitsberg, Irene T. and Wang, Hongyu and Meschter, Peter Joel}, year = {2002}, url = {https://ntrs.nasa.gov/citations/20080004987}, note = {Source identifier: 20080004987} }