@misc{indiciae5b020e711c69, title = {Integrated particles sensor formed on single substrate using fringes formed by diffractive elements}, author = {Gharib, Morteza and Fourguette, Dominique and Modarress, Darius and Taugwalder, Frederic and Forouhar, Siamak}, year = {2005}, url = {https://ntrs.nasa.gov/citations/20080005038}, note = {Source identifier: 20080005038} }