@misc{indiciae5cabe97a2573, title = {Split-resonator integrated-post MEMS gyroscope}, author = {Bae, Youngsam and Hayworth, Ken J. and Shcheglov, Kirill V.}, year = {2004}, url = {https://ntrs.nasa.gov/citations/20080005159}, note = {Source identifier: 20080005159} }