@misc{indiciaeb131b369699f,
  title = {Fluidized bed silicon deposition from silane},
  author = {Hsu, George and Levin, Harry and Hogle, Richard A. and Praturi, Ananda and Lutwack, Ralph},
  year = {1984},
  url = {https://ntrs.nasa.gov/citations/20080005854},
  note = {Source identifier: 20080005854}
}