@misc{indiciaef0d828dc524c,
  title = {Microwave bonding of MEMS component},
  author = {Barmatz, Martin B. and Mai, John D. and Jackson, Henry W. and Budraa, Nasser K. and Pike, William T.},
  year = {2005},
  url = {https://ntrs.nasa.gov/citations/20080007011},
  note = {Source identifier: 20080007011}
}