@misc{indiciae19431abc2546,
  title = {Method for fabricating semiconductor devices},
  author = {Kaiser, William J. and Grunthaner, Frank J. and Hecht, Michael H. and Bell, Lloyd D.},
  year = {1995},
  url = {https://ntrs.nasa.gov/citations/20080007430},
  note = {Source identifier: 20080007430}
}